SEMICOSIL® M3E is Methyltriethoxysilane of high purity.

  • Empirical formula C7H18O3Si CAS No.: 2031-67-6
  • Molecular weight 178


  • high purity
  • low metal content
  • low chloride content

SEMICOSIL® M3E was developed for the semiconductor industry, e.g. as precursor for low dielectric constant interlayer dielectrics.


The 'Best use before end' date of each batch is shown on the product label. Storage beyond the date specified on the label does not necessarily mean that the product is no longer usable. In this case however, the properties required for the intended use must be checked for quality assurance reasons.

Sales and support

Wacker Chemical Corporation
3301 Sutton Road
Adrian, MI 49221-9397
United States
+1  888  922-5374 (Phone)

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