SEMICOSIL® M3E
SEMICOSIL® M3E is Methyltriethoxysilane of high purity.
Properties
- high purity
- low metal content
- low chloride content
Documents
Data sheets
Application details
SEMICOSIL® M3E was developed for the semiconductor industry, e.g. as precursor for low dielectric constant interlayer dielectrics.
Packaging & Storage
Packaging
0,9kg glass bottle
170kg steel drum