SEMICOSIL® OCTS
SEMICOSIL® OCTS is Octachlorotrisilane for the use in the semiconductor industry.
Properties
SEMICOSIL® OCTS is used as precursor in ALD and CVD processes.
Documents
Data sheets
Packaging & Storage
Packaging
0,2kg in a sample bottle or 27kg in a 5ga pressure canister.
Storage
Do not store at high temperature.
Material list
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