SEMICOSIL® OCTS
SEMICOSIL® OCTS is Octachlorotrisilane for the use in the semiconductor industry.
SEMICOSIL® OCTS
Properties
SEMICOSIL® OCTS is used as precursor in ALD and CVD processes.
Data sheets
Packaging
0,2kg in a sample bottle or 27kg in a 5ga pressure canister.
Storage
Do not store at high temperature.
Sales and support
Wacker Chemical Corporation
Contact
S State Road 4950
Ann Arbor, MI 48108
United States
+1
888
922-5374
(Phone)Ann Arbor, MI 48108
United States
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