SEMICOSIL® HMN-EL

SEMICOSIL<sup>®</sup> HMN-EL
SEMICOSIL® HMN-EL is Hexamethyldisilazane of high purity.
  • CAS No. 999-97-3
  • Empirical formula C6H19NSi2

  • Molecular weight 161

Properties

  • high purity
  • low metal content
  • low chloride content
  • low residue on evaporation
Data sheets

SEMICOSIL® HMN-EL was developed for photoresists used in the semiconductor manufacture. It can be used e.g. as adhesion promoter or as silylating agent in processes such as chemical amplification.

 

Packaging

0,7kg glass bottle

20kg steel can

155kg steel drum

Storage

The 'Best use before end' date of each batch is shown on the product label. Storage beyond the date specified on the label does not necessarily mean that the product is no longer usable. In this case however, the properties required for the intended use must be checked for quality assurance reasons.

Sales and support

Wacker Chemical Corporation

S State Road 4950

Ann Arbor, MI 48108

United States