SEMICOSIL® 4MS-EL

SEMICOSIL® Silanes, Siloxanes & Silicates

Tetramethylsilane (TMS) is a low-boiling colorless liquid.

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  • CAS No. 75-76-3

  • Empirical formula C4H12Si

  • Molecular weight 88,2

Properties

- high purity
- low metal content
- low chloride content
Data sheets
TDS Technical data sheet
PDF 42 KB
English

SEMICOSIL® 4MS-EL was developed for the semiconductor industry, e.g. as precursor for low dielectric constant interlayer dielectrics.

 

Storage

The 'Best use before end' date of each batch is shown on the product label. Storage beyond the date specified on the label does not necessarily mean that the product is no longer usable. In this case however, the properties required for the intended use must be checked for quality assurance reasons.

Sales and support

Wacker Chemical Corporation

S State Road 4950

Ann Arbor, MI 48108

United States

+1  888  922-5374