Silanes for the Electronics Industry

High purity combined with extremely low metal contamination make SEMICOSIL® electronic silanes a key material for the semiconductor industry. As one of the world’s largest producers of silanes, WACKER boasts an innovative portfolio of additives for producing microelectronic components, raw materials for process optimization and precursors for depositing insulating layers in CVD chambers.

SEMICOSIL® TEOS tetraethyl orthosilicates and SEMICOSIL® dimethyldimethoxysilanes act as insulating layers in semiconductor components.

Advantages

  • High purity
  • Low metal content
  • Low chloride content
  • Low methanol content
  • Special grades with very low dielectric constants for new chip generations

Applications

  • Precursor in the generation of insulating layers by CVD
  • Constituent of coatings produced by spin-on processes

SEMICOSIL® silanes are RTV-1 sllicone rubbers used as additives for microelectronic applications and as raw materials for process optimization in the field of lithography.

  • High purity
  • Low metal content
  • Low chloride content
  • Low evaporation residue

Applications

  • Adhesion promoter in lithographic processes
  • Raw material for modifying photoresist polymers
  • Raw material for generating structures on insulating layers
  • Fabrication of etch-stop layers