SEMICOSIL® 6C2S is hyperpure Hexachlorodisilane.

  • Empirical formula Cl6Si2
  • Molecular weight 269


  • ultra high purity
  • low metal content

SEMICOSIL® 6C2S was developed for the semiconductor industry, e.g. as precursor for low temperature deposition processes.


The 'Best use before end' date of each batch is shown on the product label. Storage beyond the date specified on the label does not necessarily mean that the product is no longer usable. In this case however, the properties required for the intended use must be checked for quality assurance reasons.

Sales and support

Wacker Chemical Corporation
3301 Sutton Road
Adrian, MI 49221-9397
United States
+1  888  922-5374 (Phone)

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