SEMICOSIL® OCTS

SEMICOSIL® OCTS is Octachlorotrisilane for the use in the semiconductor industry.

  • CAS No. 13596-23-1
  • Empirical formula Si3Cl8
  • Molecular weight 367,88

Properties

SEMICOSIL® OCTS is used as precursor in ALD and CVD processes.

Packaging

0,2kg in a sample bottle or 27kg in a 5ga pressure canister.

Storage

Do not store at high temperature.

Sales and support

Wacker Chemicals Ltd.
2 Arlington Square, Downshire Way
Bracknell RG12 1WA
United Kingdom
+44  1344  401 670 (Phone)
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Distributors

WACKER has a global network of specialist distributors at its disposal. Please select an application so that we can suggest suitable contacts.

IMCD UK Ltd.
Times House, Throwley Way
SM1 4AF Sutton, Surrey
44  208  7707090 (Phone)
44 208 7707295   (Fax)
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