SEMICOSIL® OCTS

SEMICOSIL® OCTS is Octachlorotrisilane for the use in the semiconductor industry.

  • CAS No. 13596-23-1
  • Empirical formula Si3Cl8
  • Molecular weight 367,88

Properties

SEMICOSIL® OCTS is used as precursor in ALD and CVD processes.

Packaging

0,2kg in a sample bottle or 27kg in a 5ga pressure canister.

Storage

Do not store at high temperature.

Sales and support

Wacker Quimica Ibérica S.A.
Calle Córcega 303, 5a planta
08008 Barcelona
Spain
+34  93  29207-00 (Phone)
+34 93 21757-66  (Fax)
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