SEMICOSIL® OCTS

SEMICOSIL® OCTS is Octachlorotrisilane for the use in the semiconductor industry.

  • CAS No. 13596-23-1
  • Empirical formula Si3Cl8
  • Molecular weight 367,88

Properties

SEMICOSIL® OCTS is used as precursor in ALD and CVD processes.

Packaging

0,2kg in a sample bottle or 27kg in a 5ga pressure canister.

Storage

Do not store at high temperature.

Sales and support

Wacker-Chemie, s.r.o.
Podnikatelska 1186/45
301 00 Plzen - Skvrnany
Czech Republic
+420  378  010-103 (Phone)
+420 378 010-113  (Fax)
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