Dielectrics in Semiconductor Components - Wacker Chemie AG


Dielectrics

in Semiconductor Components

In chip manufacture, SEMICOSIL®-TEOS tetraethyl orthosilicates are important feedstocks and are preferably used for generating dielectric layers by CVD. In developing novel SEMICOSIL® silanes, WACKER is meeting the stricter specifications for lower dielectric constants in the latest generation of chips.

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SEMICOSIL® 2M2M CVD - PrecursorSilanesElectronics grade> 99 %
SEMICOSIL® M3E CVD - PrecursorSilanesElectronics grade> 99 %